F7541 Vacuum physics - laboratory

Faculty of Science
Autumn 2023
Extent and Intensity
1/3/0. 6 credit(s). Type of Completion: z (credit).
Teacher(s)
doc. Mgr. Pavel Slavíček, Ph.D. (lecturer)
Guaranteed by
doc. Mgr. Pavel Slavíček, Ph.D.
Department of Plasma Physics and Technology – Physics Section – Faculty of Science
Contact Person: doc. Mgr. Pavel Slavíček, Ph.D.
Supplier department: Department of Plasma Physics and Technology – Physics Section – Faculty of Science
Timetable
Mon 12:00–14:50 Kontaktujte učitele, Wed 11:00–11:50 Fs2 6/4003
Prerequisites
passing through the lecture Vacuum physics 1 (F 4160) or declared knowledges of the similar topic
Course Enrolment Limitations
The course is also offered to the students of the fields other than those the course is directly associated with.
fields of study / plans the course is directly associated with
Course objectives
It is the purpose of this lecture to give a practical knowledge of vacuum pumps and calibration of different types of vacuum gauges. vacuum technology, measurement pumping speed of vacuum pumps and deposition of thin film at low pressure.
Learning outcomes
Student will be able to measure the basic parameters of vacuum pumps and manometers at the end of the course.
Syllabus
  • Calibration of different types of vacuum gauges (Pirani, cold-cathode and hot-cathode ionization gauges).
  • Measurement of pumping speed of vacuum pumps.
  • Measurement on mass spectrometer.
  • Deposition of thin film.
Literature
  • GROSZKOWSKI, J. Technika vysokého vakua (High vacuum technology). Praha: SNTL, 1981. ISBN 04-066-81. info
  • ROTH, A. Vacuum technology. Amsterdam: North-Holland, 1976. ISBN 0-7204-0213 8. info
  • PÁTÝ, Libor. Fyzika nízkých tlaků. Praha: Academia, nakladatelství Československé akademie věd, 1968, 298 s. info
Teaching methods
Laboratory course
Assessment methods
credit- student must submit and test protocols of measurements
Language of instruction
Czech
Further comments (probably available only in Czech)
Study Materials
The course can also be completed outside the examination period.
The course is taught annually.
The course is also listed under the following terms Autumn 2007 - for the purpose of the accreditation, Autumn 1999, Autumn 2010 - only for the accreditation, Autumn 2000, Autumn 2001, Autumn 2002, Autumn 2003, Autumn 2004, Autumn 2005, Autumn 2006, Autumn 2007, Autumn 2008, Autumn 2009, Autumn 2010, Autumn 2011, Autumn 2011 - acreditation, spring 2012 - acreditation, Autumn 2012, Autumn 2013, Autumn 2014, Autumn 2015, Autumn 2016, autumn 2017, Autumn 2018, Autumn 2019, Autumn 2020, autumn 2021, Autumn 2022, Autumn 2024.
  • Enrolment Statistics (Autumn 2023, recent)
  • Permalink: https://is.muni.cz/course/sci/autumn2023/F7541