| MEDVECKÁ, Veronika, Anna ZAHORANOVÁ, Dušan KOVÁČIK a Ján GREGUŠ. THE EFFECT OF SURFACE CLEANING AND REMOVING OF ORGANIC CONTAMINANTS FROM SILICON SUBSTRATES AND ITO GLASS BY ATMOSPHERIC PRESSURE NON-THERMAL PLASMA. CHEMICKÉ LISTY. Praha: Česká společnost chemická, roč. 106, S, s. 1455-1459. ISSN 0009-2770. 2012. |
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@article{1094600,
author = {Medvecká, Veronika and Zahoranová, Anna and Kováčik, Dušan and Greguš, Ján},
article_location = {Praha},
article_number = {S},
keywords = {DCSBD; silicon substrates; ITO glass;cleaning; organic contaminants},
language = {eng},
issn = {0009-2770},
journal = {CHEMICKÉ LISTY},
title = {THE EFFECT OF SURFACE CLEANING AND REMOVING OF ORGANIC CONTAMINANTS FROM SILICON SUBSTRATES AND ITO GLASS BY ATMOSPHERIC PRESSURE NON-THERMAL PLASMA},
volume = {106},
year = {2012}
}
TY - JOUR
ID - 1094600
AU - Medvecká, Veronika - Zahoranová, Anna - Kováčik, Dušan - Greguš, Ján
PY - 2012
TI - THE EFFECT OF SURFACE CLEANING AND REMOVING OF ORGANIC CONTAMINANTS FROM SILICON SUBSTRATES AND ITO GLASS BY ATMOSPHERIC PRESSURE NON-THERMAL PLASMA
JF - CHEMICKÉ LISTY
VL - 106
IS - S
SP - 1455-1459
EP - 1455-1459
PB - Česká společnost chemická
SN - 00092770
KW - DCSBD
KW - silicon substrates
KW - ITO glass;cleaning
KW - organic contaminants
N2 - Plasma generated by DCSBD was investigated for cleaning and removing of organic contaminants from semiconductor materials. ITO glass used in photovoltaics and three types of most often used silicon surfaces in semiconductor industry – precleaned silicon, thermally oxidized silicon and H-terminated silicon was studied. The changes in chemical bonds on silicon surfaces were investigated by FTIR. Removing of IPA from silicon substrates was observed by XPS measurements. Effectivity of DCSBD as cleaning agent in comparison with isopropylacohol was investigated on ITO glass samples by XPS measurement.
ER -
MEDVECKÁ, Veronika, Anna ZAHORANOVÁ, Dušan KOVÁČIK a Ján GREGUŠ. THE EFFECT OF SURFACE CLEANING AND REMOVING OF ORGANIC CONTAMINANTS FROM SILICON SUBSTRATES AND ITO GLASS BY ATMOSPHERIC PRESSURE NON-THERMAL PLASMA. \textit{CHEMICKÉ LISTY}. Praha: Česká společnost chemická, roč.~106, S, s.~1455-1459. ISSN~0009-2770. 2012.
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