HOUŠKA, Jan, Eladia Maria PEÑA-MÉNDEZ, Jakub KOLÁŘ, Jan PŘIKRYL, Martin PVLIŠTA, Miloslav FRUMAR, Tomáš WÁGNER and Josef HAVEL. Laser desorption time-of-flight mass spectrometry of atomic switch memory Ge2Sb2Te5 bulk materials and its thin films. Rapid Communications in Mass Spectrometry. 2014, vol. 28, No 7, p. 699-704. ISSN 0951-4198. Available from: https://dx.doi.org/10.1002/rcm.6833.
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Basic information
Original name Laser desorption time-of-flight mass spectrometry of atomic switch memory Ge2Sb2Te5 bulk materials and its thin films
Authors HOUŠKA, Jan (203 Czech Republic, belonging to the institution), Eladia Maria PEÑA-MÉNDEZ (724 Spain), Jakub KOLÁŘ (203 Czech Republic), Jan PŘIKRYL (203 Czech Republic), Martin PVLIŠTA (203 Czech Republic), Miloslav FRUMAR (203 Czech Republic), Tomáš WÁGNER (203 Czech Republic) and Josef HAVEL (203 Czech Republic, guarantor, belonging to the institution).
Edition Rapid Communications in Mass Spectrometry, 2014, 0951-4198.
Other information
Original language English
Type of outcome Article in a journal
Field of Study 10406 Analytical chemistry
Country of publisher United States of America
Confidentiality degree is not subject to a state or trade secret
Impact factor Impact factor: 2.253
RIV identification code RIV/00216224:14310/14:00073479
Organization unit Faculty of Science
Doi http://dx.doi.org/10.1002/rcm.6833
UT WoS 000332988600004
Keywords in English atomic switch memory thin films pulsed laser deposition laser desorption time of flight mass spectrometry clusters solid phase structural fragments phase change materials Ge2Sb2Te5 (GST) laser ablation
Tags AKR, atomic switch memory, Clusters, laser ablation, laser desorption, phase-change materials, pulsed laser deposition, rivok, solid phase structural fragments, thin films, TOF mass spectrometry
Changed by Changed by: Ing. Andrea Mikešková, učo 137293. Changed: 9/4/2015 16:08.
Abstract
The report elucidates the stoichiometry of GemSbnTep clusters formed in plasma when bulk or nano-layers of GST material are ablated. The clusters stoichiometry were identified using isotopic envelope analysis. The singly negatively or positively charged clusters identified from the LDI of GST were Ge, Ge2, GeTe, Ge2Te, Ten (n=1–3), GeTe2, Ge2Te2, GeTe3, SbTe2, Sb2Te, GeSbTe2, Sb3Te and the low abundance ternary GeSbTe3, while the LDI of germanium telluride yielded GemTen + clusters (m=1–3, n=1–3). Several minor Ge-H clusters were also observed for pure germanium and for germanium telluride. Sbn clusters (n=1–3) and the formation of binary TeSb, TeSb2 and TeSb3 clusters were detected when Sb2Te3 was examined. The clusters were found to be fragments of the original structure.
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GA13-05082S, research and development projectName: Analýza a aplikace plazmatických procesů pro přípravu tenkých vrstev amorfních chalkogenidů
Investor: Czech Science Foundation
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