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@proceedings{1363934,
author = {Fekete, Matej and Hnilica, Jaroslav and Vitelaru, Catalin and Minea, Tiberiu and Vašina, Petr},
booktitle = {Fifteenth International Conference on Reactive Sputter Deposition 2016},
keywords = {HiPIMS; OES; titanium},
language = {eng},
title = {Time resolved study of Ti sputtered species number densities in multi-pulse HiPIMS discharge},
year = {2016}
}
TY - CONF
ID - 1363934
AU - Fekete, Matej - Hnilica, Jaroslav - Vitelaru, Catalin - Minea, Tiberiu - Vašina, Petr
PY - 2016
TI - Time resolved study of Ti sputtered species number densities in multi-pulse HiPIMS discharge
KW - HiPIMS
KW - OES
KW - titanium
N2 - A technique based on effective branching fractions was extended to determine the absolute ground state number densities of Ti atoms and Ti ions. The effective branching method was cross validated by TD-LAS technique while studying the dc magnetron sputtering discharge. Influence of preceding pulse on the subsequent pulse in the m-HiPIMS mode was examined as a function of delay (200µs, 400µs and 1500µs) between two successive pulses for the pulse duration of 200µs.
ER -
FEKETE, Matej, Jaroslav HNILICA, Catalin VITELARU, Tiberiu MINEA a Petr VAŠINA. Time resolved study of Ti sputtered species number densities in multi-pulse HiPIMS discharge. In \textit{Fifteenth International Conference on Reactive Sputter Deposition 2016}. 2016.
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