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@proceedings{1440759,
author = {Souček, Pavel and Hnilica, Jaroslav and Zábranský, Lukáš and Buršíková, Vilma and Stupavská, Monika and Vašina, Petr},
booktitle = {16th International Conference on Plasma Surface Engineering},
keywords = {nanocomposites; HiPIMS; magnetron sputtering},
language = {eng},
title = {The role of applied bias on the properties of HiPIMS deposited nc-TiC/a-C:H coatings},
year = {2018}
}
TY - CONF
ID - 1440759
AU - Souček, Pavel - Hnilica, Jaroslav - Zábranský, Lukáš - Buršíková, Vilma - Stupavská, Monika - Vašina, Petr
PY - 2018
TI - The role of applied bias on the properties of HiPIMS deposited nc-TiC/a-C:H coatings
KW - nanocomposites
KW - HiPIMS
KW - magnetron sputtering
N2 - Nanocomposite coatings consisting of nanocrystallites embedded in an amorphous matrix such as nc-TiC/a-C:H can be tailored to exhibit an unusual combination of properties like high hardness and elastic modulus combined with low friction and wear. These coatings are usually deposited utilising direct current magnetron sputtering (DCMS) leading to low ionisation of the sputtered titanium and to lower Ar+ ion bombardment impinging the growing coating. The ion bombardment of the substrates is routinely enhanced via increasing the energy of the bombarding ions due to the application of a negative bias onto the samples. The use of high power impulse magnetron sputtering (HiPIMS) usually leads to much higher ionisation of the sputtered titanium which can alter the deposition process and to more severe ion bombardment of the growing coating changing the properties of the deposited coatings.
ER -
SOUČEK, Pavel, Jaroslav HNILICA, Lukáš ZÁBRANSKÝ, Vilma BURŠÍKOVÁ, Monika STUPAVSKÁ a Petr VAŠINA. The role of applied bias on the properties of HiPIMS deposited nc-TiC/a-C:H coatings. In \textit{16th International Conference on Plasma Surface Engineering}. 2018.
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