| SŤAHEL, Pavel, S HAMMA, Petr SLÁDEK a Pere ROCA I CABARROCAS. Metastability studies in silicon thin films: from short range ordered to medium and long range ordered materials. Journal of Non-Crystalline Solids. Nizozemsko: Elsevier Science B.V., 1998, roč. 227, PART 1, s. 276-280. ISSN 0022-3093. Dostupné z: https://dx.doi.org/10.1016/S0022-3093(98)00269-5. |
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@article{1616964,
author = {Sťahel, Pavel and Hamma, S and Sládek, Petr and Roca i Cabarrocas, Pere},
article_location = {Nizozemsko},
article_number = {PART 1},
doi = {http://dx.doi.org/10.1016/S0022-3093(98)00269-5},
keywords = {metastability; microcrystalline Si; a-Si; thin film},
language = {eng},
issn = {0022-3093},
journal = {Journal of Non-Crystalline Solids},
title = {Metastability studies in silicon thin films: from short range ordered to medium and long range ordered materials},
volume = {227},
year = {1998}
}
TY - JOUR
ID - 1616964
AU - Sťahel, Pavel - Hamma, S - Sládek, Petr - Roca i Cabarrocas, Pere
PY - 1998
TI - Metastability studies in silicon thin films: from short range ordered to medium and long range ordered materials
JF - Journal of Non-Crystalline Solids
VL - 227
IS - PART 1
SP - 276-280
EP - 276-280
PB - Elsevier Science B.V.
SN - 00223093
KW - metastability
KW - microcrystalline Si
KW - a-Si
KW - thin film
N2 - The effects of disorder on the kinetics of creation of metastable defects on silicon thin films have been studied through the evolution of the dark conductivity, the photoconductivity and the subgap absorption. Hydrogenated amorphous silicon, representative of short range ordered materials has been compared to polymorphous silicon (medium range order) and to microcrystalline silicon (long range order). Changing from short range ordered to medium range ordered materials results in a faster kinetics of creation of metastable defects as well as to films with better properties in both as-deposited and light-soaked states. Microcrystalline silicon films with crystalline fractions above 60% present stability and an improvement of their properties during light-soaking. (C) 1998 Elsevier Science B.V. All rights reserved.
ER -
SŤAHEL, Pavel, S HAMMA, Petr SLÁDEK a Pere ROCA I CABARROCAS. Metastability studies in silicon thin films: from short range ordered to medium and long range ordered materials. \textit{Journal of Non-Crystalline Solids}. Nizozemsko: Elsevier Science B.V., 1998, roč.~227, PART 1, s.~276-280. ISSN~0022-3093. Dostupné z: https://dx.doi.org/10.1016/S0022-3093(98)00269-5.
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