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@proceedings{1620916,
author = {Bernátová, Katarína and Fekete, Matej and Klein, Peter and Hnilica, Jaroslav and Vašina, Petr},
booktitle = {Workshop on Plasma-Based Synthesis of Nanomaterials},
keywords = {reactive HiPIMS; density; titanium; ionized density fraction},
language = {eng},
title = {Effect of nitrogen on sputtered species number densities evolution in reactive HiPIMS},
url = {http://kmf.troja.mff.cuni.cz/pse/},
year = {2020}
}
TY - CONF
ID - 1620916
AU - Bernátová, Katarína - Fekete, Matej - Klein, Peter - Hnilica, Jaroslav - Vašina, Petr
PY - 2020
TI - Effect of nitrogen on sputtered species number densities evolution in reactive HiPIMS
KW - reactive HiPIMS
KW - density
KW - titanium
KW - ionized density fraction
UR - http://kmf.troja.mff.cuni.cz/pse/
L2 - http://kmf.troja.mff.cuni.cz/pse/
N2 - Adding a reactive gas into the HiPIMS process opens up a new alley of producing novel materials with a wide range of different compositions. The temporal evolution of the absolute number of the sputtered titanium atoms and ions, the ionized density fraction in the target region and the ion flux in the substrate region in reactive HiPIMS process for different partial pressures of the reactive gas are presented in this contribution.
ER -
BERNÁTOVÁ, Katarína, Matej FEKETE, Peter KLEIN, Jaroslav HNILICA a Petr VAŠINA. Effect of nitrogen on sputtered species number densities evolution in reactive HiPIMS. In \textit{Workshop on Plasma-Based Synthesis of Nanomaterials}. 2020.
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