| JERGEL, M., Petr MIKULÍK, E. MAJKOVÁ, Š. LUBY, R. SENDERÁK, E. PINČÍK, M. BRUNEL, I. KOSTIČ a A. KONEČNÍKOVÁ. Structural characterization of lamellar multilayer gratings by X-ray reflectivity and scanning electron microscopy. J. Phys. D: Appl. Phys. Velká Britanie: IOP Publishing Ltd, 1999, roč. 32, č. 9999, s. A220, 4 s. ISSN 0022-3727. |
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@article{205366,
author = {Jergel, M. and Mikulík, Petr and Majková, E. and Luby, Š. and Senderák, R. and Pinčík, E. and Brunel, M. and Kostič, I. and Konečníková, A.},
article_location = {Velká Britanie},
article_number = {9999},
keywords = {gratings; multilayers; x-ray reflectivity},
language = {eng},
issn = {0022-3727},
journal = {J. Phys. D: Appl. Phys.},
title = {Structural characterization of lamellar multilayer gratings by X-ray reflectivity and scanning electron microscopy},
url = {http://www.sci.muni.cz/~mikulik/Publications.html#JergelMikulikXTOP98},
volume = {32},
year = {1999}
}
TY - JOUR
ID - 205366
AU - Jergel, M. - Mikulík, Petr - Majková, E. - Luby, Š. - Senderák, R. - Pinčík, E. - Brunel, M. - Kostič, I. - Konečníková, A.
PY - 1999
TI - Structural characterization of lamellar multilayer gratings by X-ray reflectivity and scanning electron microscopy
JF - J. Phys. D: Appl. Phys.
VL - 32
IS - 9999
SP - A220
EP - A220
PB - IOP Publishing Ltd
SN - 00223727
KW - gratings
KW - multilayers
KW - x-ray reflectivity
UR - http://www.sci.muni.cz/~mikulik/Publications.html#JergelMikulikXTOP98
N2 - Structural characterization of a fully etched amorphous W/Si multilayer grating with lateral periodicity 800 nm is performed by x-ray reflectivity. Grating truncation rod profiles have been calculated using a matrix modal eigenvalue approach of the dynamical theory of reflectivity by gratings which generalizes the Fresnel transmission and reflection coefficients for lateral diffraction. The interface roughness in rough gratings has been taken into account by a coherent amplitude approach which damps the generalized Fresnel coefficients. Scanning electron microscopy pictures complete the study.
ER -
JERGEL, M., Petr MIKULÍK, E. MAJKOVÁ, Š. LUBY, R. SENDERÁK, E. PINČÍK, M. BRUNEL, I. KOSTIČ a A. KONEČNÍKOVÁ. Structural characterization of lamellar multilayer gratings by X-ray reflectivity and scanning electron microscopy. \textit{J. Phys. D: Appl. Phys.}. Velká Britanie: IOP Publishing Ltd, 1999, roč.~32, č.~9999, s.~A220, 4 s. ISSN~0022-3727.
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