BURŠÍKOVÁ, Vilma, Lenka ZAJÍČKOVÁ and Jan JANČA. Influence of Deposition Parameters on Mechanical Properties opf SiO2-like Protective Coatings. In ICPP. 1st ed. Praha: Ústav fyziky plazmatu ČAV, Praha, 1998, p. 918-921.
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Basic information
Original name Influence of Deposition Parameters on Mechanical Properties opf SiO2-like Protective Coatings
Authors BURŠÍKOVÁ, Vilma (203 Czech Republic, guarantor), Lenka ZAJÍČKOVÁ (203 Czech Republic) and Jan JANČA (203 Czech Republic).
Edition 1. vyd. Praha, ICPP, p. 918-921, 1998.
Publisher Ústav fyziky plazmatu ČAV, Praha
Other information
Original language English
Type of outcome Proceedings paper
Field of Study 10305 Fluids and plasma physics
Country of publisher Czech Republic
Confidentiality degree is not subject to a state or trade secret
Organization unit Faculty of Science
Keywords in English mechanical propertires; thin Films; PECVD
Tags mechanical propertires, PECVD, thin films
Tags International impact
Changed by Changed by: doc. Mgr. Lenka Zajíčková, Ph.D., učo 1414. Changed: 17/7/2007 17:25.
Abstract
Influence of Deposition Parameters on Mechanical Properties opf SiO2-like Protective Coatings
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