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@misc{2277919,
author = {Hnilica, Jaroslav and Ondryáš, Martin and Souček, Pavel and Klein, Peter and Fekete, Matej and Vašina, Petr},
booktitle = {HiPIMS Today 2023},
keywords = {magnetron, sputering, multipulse, OES, QCM, SEM, XRD},
language = {eng},
title = {Describing the multipulse HiPIMS deposition},
url = {https://www.hipims.today},
year = {2023}
}
TY - SLIDE
ID - 2277919
AU - Hnilica, Jaroslav - Ondryáš, Martin - Souček, Pavel - Klein, Peter - Fekete, Matej - Vašina, Petr
PY - 2023
TI - Describing the multipulse HiPIMS deposition
KW - magnetron, sputering, multipulse, OES, QCM, SEM, XRD
UR - https://www.hipims.today
ER -
HNILICA, Jaroslav, Martin ONDRYÁŠ, Pavel SOUČEK, Peter KLEIN, Matej FEKETE a Petr VAŠINA. Describing the multipulse HiPIMS deposition. In \textit{HiPIMS Today 2023}. 2023.
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