KANICKÝ, Viktor, Vítězslav OTRUBA a Jean-Michel MERMET. Depth profiling of tin-coated glass by laser ablation inductively coupled plasma atomic emission spectrometry with acoustic signal measurement. Fresenius Journal of Analytical Chemistry. Berlin: Springer-Verlag, 2000, roč. 366, č. 3, s. 228-233. ISSN 0937-0633.
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Základní údaje
Originální název Depth profiling of tin-coated glass by laser ablation inductively coupled plasma atomic emission spectrometry with acoustic signal measurement
Autoři KANICKÝ, Viktor (203 Česká republika, garant), Vítězslav OTRUBA (203 Česká republika) a Jean-Michel MERMET (250 Francie).
Vydání Fresenius Journal of Analytical Chemistry, Berlin, Springer-Verlag, 2000, 0937-0633.
Další údaje
Originální jazyk angličtina
Typ výsledku Článek v odborném periodiku
Obor 10406 Analytical chemistry
Stát vydavatele Německo
Utajení není předmětem státního či obchodního tajemství
Impakt faktor Impact factor: 1.418
Kód RIV RIV/00216224:14310/00:00002272
Organizační jednotka Přírodovědecká fakulta
Klíčová slova anglicky Laser ablation; Inductively coupled plasma; Atomic emission spectrometry; Tin coating; Glass
Štítky atomic emission spectrometry, glass, inductively coupled plasma, laser ablation, Tin coating
Příznaky Mezinárodní význam, Recenzováno
Změnil Změnil: prof. RNDr. Viktor Kanický, DrSc., učo 408. Změněno: 29. 6. 2007 10:25.
Anotace
A pulsed, frequency-quadrupled Nd:YAG laser (266 nm, 10 Hz) coupled to an inductively coupled plasma atomic emission spectrometer (ICP-AES) was employed for depth profiling by ablation of a pyrolytically deposited Sn layer (300 nm) on float glass. The procedure consisted of performing individual ablation cycles (layer-by-layer). A raster with stroke distance of either 50 mu m or 200 mu m (the raster density) was used as an ablation pattern. The ablation was stopped after each cycle and the peal; area of the resulting transient optical signal of the ICP discharge was plotted against the cycle number. The ablation rate of 90 to 20 nm per cycle at a low-energy pulse (6 mJ to 1 mJ) was determined by profilometry. A beam masking was employed to attenuate the laser shot energy and to eliminate the peripheral irregularity of the beam profile. Almost uniform removal of the square area (1 mm x 1 mm) of the coating by ablation was achieved by combining the fitted raster density, beam masking, focusing and beam energy. Different ablation processes were distinguished in cases of the tin coating and the uncoated glass surface. While the coating was mainly evaporated, the uncoated glass surface exhibited a crumbling associated with production of glass powder. This was confirmed by electron microscopy observations. The measured acoustic signal followed the behavior of the emission intensity of the Sn line and was supposed to be proportional to the amount of Sn vapors. The emission intensity depth profile of the Sn coating with graded structure was obtained, which qualitatively corresponded with the depth profile measured by secondary ion mass spectrometry.
Anotace česky
A pulsed, frequency-quadrupled Nd:YAG laser (266 nm, 10 Hz) coupled to an inductively coupled plasma atomic emission spectrometer (ICP-AES) was employed for depth profiling by ablation of a pyrolytically deposited Sn layer (300 nm) on float glass. The procedure consisted of performing individual ablation cycles (layer-by-layer). A raster with stroke distance of either 50 mu m or 200 mu m (the raster density) was used as an ablation pattern. The ablation was stopped after each cycle and the peal; area of the resulting transient optical signal of the ICP discharge was plotted against the cycle number. The ablation rate of 90 to 20 nm per cycle at a low-energy pulse (6 mJ to 1 mJ) was determined by profilometry. A beam masking was employed to attenuate the laser shot energy and to eliminate the peripheral irregularity of the beam profile. Almost uniform removal of the square area (1 mm x 1 mm) of the coating by ablation was achieved by combining the fitted raster density, beam masking, focusing and beam energy. Different ablation processes were distinguished in cases of the tin coating and the uncoated glass surface. While the coating was mainly evaporated, the uncoated glass surface exhibited a crumbling associated with production of glass powder. This was confirmed by electron microscopy observations. The measured acoustic signal followed the behavior of the emission intensity of the Sn line and was supposed to be proportional to the amount of Sn vapors. The emission intensity depth profile of the Sn coating with graded structure was obtained, which qualitatively corresponded with the depth profile measured by secondary ion mass spectrometry.
Návaznosti
GA203/97/0345, projekt VaVNázev: Charakterizace speciálních materiálů pro moderní technologie
Investor: Grantová agentura ČR, Standardní projekty
VS97020, projekt VaVNázev: Laboratoř plazmových zdrojů pro chemickou analýzu
Investor: Ministerstvo školství, mládeže a tělovýchovy ČR, Posílení výzkumu na vysokých školách
VytisknoutZobrazeno: 5. 3. 2021 13:37