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@article{334911,
author = {Franta, Daniel and Ohlídal, Ivan},
article_location = {USA},
article_number = {1},
keywords = {Inhomogeneous ZrO2-films; Optical characterization; Spectroscopic ellipsometry; Spectroscopic reflectometry},
language = {eng},
issn = {0142-2421},
journal = {Surface and Interface Analysis},
title = {Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry},
url = {http://hydra.physics.muni.cz/~franta/bib/SIA30_574.html},
volume = {30},
year = {2000}
}
TY - JOUR
ID - 334911
AU - Franta, Daniel - Ohlídal, Ivan
PY - 2000
TI - Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry
JF - Surface and Interface Analysis
VL - 30
IS - 1
SP - 574-579
EP - 574-579
PB - John Wiley & Sons
SN - 01422421
KW - Inhomogeneous ZrO2-films
KW - Optical characterization
KW - Spectroscopic ellipsometry
KW - Spectroscopic reflectometry
UR - http://hydra.physics.muni.cz/~franta/bib/SIA30_574.html
N2 - In this paper results concerning the optical characterization of the inhomogeneous thin films of ZrO2 are presented. The optical characterization of these films is performed using the simultaneous interpretation of experimental data corresponding to variable angle of incidence spectroscopic ellipsometry (VASE) and near-normal incidence spectroscopic reflectometry (NNSR). It is shown that the ZrO2-films exhibit a depth inhomogeneity concerning their refractive indices. Further, it is shown that the ZrO2-films studied can be replaced by the four-layer system from the point of view of satisfactory fits of the experimental data. The values of the thicknesses and spectral dependences of the refractive indices of these four films are determined. Moreover, it is proved that the individual methods, i.e. VASE and especially NNSR, can not be separately used to characterize the ZrO2-films investigated.
ER -
FRANTA, Daniel a Ivan OHLÍDAL. Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry. \textit{Surface and Interface Analysis}. USA: John Wiley \&{} Sons, 2000, roč.~30, č.~1, s.~574-579. ISSN~0142-2421.
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