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@inproceedings{371191,
author = {Zajíčková, Lenka and Dvořák, Pavel and Buršíková, Vilma and Peřina, Vratislav and Macková, Anna and Navrátil, Vladislav and Janča, Jan},
address = {Orleans (France)},
booktitle = {Proceedings of 15th International Symposium on Plasma Chemistry},
keywords = {PECVD; Diamod-like carbon; Hardness; Optical emission spectroscopy ; ion density;},
language = {eng},
location = {Orleans (France)},
pages = {133-138},
publisher = {GREMI, CNRS/University of Orleans},
title = {Plasma Enhanced CVD of DLC:Si(O) Films from Methane/Hexamethyldisiloxane Feeds},
year = {2001}
}
TY - JOUR
ID - 371191
AU - Zajíčková, Lenka - Dvořák, Pavel - Buršíková, Vilma - Peřina, Vratislav - Macková, Anna - Navrátil, Vladislav - Janča, Jan
PY - 2001
TI - Plasma Enhanced CVD of DLC:Si(O) Films from Methane/Hexamethyldisiloxane Feeds
PB - GREMI, CNRS/University of Orleans
CY - Orleans (France)
KW - PECVD
KW - Diamod-like carbon
KW - Hardness
KW - Optical emission spectroscopy
KW - ion density;
N2 - Low pressure deposition of hard carbon films with addition of silicon and oxide was carried out in the mixture of methane and hexamethyldisiloxane (HMDSO). Film properties like deposition rate, hardness and optical constants depended strongly on tbe HMDSO to methane ratio. Moreover, the self bias voltage at the powered electrode, on which the substrates were placed, depended on this ratio too. Therefore, the plasma parameters were studied by OES and capacitavely coupled planar ion flux probe. It was found, that the temperatures as well as positive ion current density depended on the HMDSO to methane flow rate ratio but not on the self bias voltage that was independently changed with an external dc voltage supply.
ER -
ZAJÍČKOVÁ, Lenka, Pavel DVOŘÁK, Vilma BURŠÍKOVÁ, Vratislav PEŘINA, Anna MACKOVÁ, Vladislav NAVRÁTIL a Jan JANČA. Plasma Enhanced CVD of DLC:Si(O) Films from Methane/Hexamethyldisiloxane Feeds. In \textit{Proceedings of 15th International Symposium on Plasma Chemistry}. Orleans (France): GREMI, CNRS/University of Orleans, 2001, s.~133-138.
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