| ELIÁŠ, Marek, Jaromír ŽÍLA, Jan JANČA a Vlastimil BROŽEK. Simultaneous plasmachemical reduction of mixed tungsten and titanion precursors. Czech. Jourmal of Physics. Praha: Institute of Physics Academy of Sciences, 2002, roč. 2002, č. 52, s. 857-1716. ISSN 001-4626. |
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@article{483495,
author = {Eliáš, Marek and Žíla, Jaromír and Janča, Jan and Brožek, Vlastimil},
article_location = {Praha},
article_number = {52},
keywords = {tungsten; titaniun; plasma; ICP},
language = {eng},
issn = {001-4626},
journal = {Czech. Jourmal of Physics},
title = {Simultaneous plasmachemical reduction of mixed tungsten and titanion precursors},
volume = {2002},
year = {2002}
}
TY - JOUR
ID - 483495
AU - Eliáš, Marek - Žíla, Jaromír - Janča, Jan - Brožek, Vlastimil
PY - 2002
TI - Simultaneous plasmachemical reduction of mixed tungsten and titanion precursors
JF - Czech. Jourmal of Physics
VL - 2002
IS - 52
SP - 857
EP - 857
PB - Institute of Physics Academy of Sciences
SN - 0014626
KW - tungsten
KW - titaniun
KW - plasma
KW - ICP
N2 - Simultaneous plasmachemical reduction of mixed tungsten and titanion precursors
ER -
ELIÁŠ, Marek, Jaromír ŽÍLA, Jan JANČA a Vlastimil BROŽEK. Simultaneous plasmachemical reduction of mixed tungsten and titanion precursors. \textit{Czech. Jourmal of Physics}. Praha: Institute of Physics Academy of Sciences, 2002, roč.~2002, č.~52, s.~857-1716. ISSN~001-4626.
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