| BUBLAN, Martin, Petr VAŠINA, Ludovic DE POUCQUES, Caroline BOISSE-LAPORTE, Jean-Christophe IMBERT a Michel TOUZEAU. Spatial Distribution of Species in an IPVD reactor. In WDS 03 Proceeding of Contributed Papers. Praha: MARFYZPRESS, vydavatelství Matematicko-fyzikální fakulty University Karlovy v Praze, 2003, s. 326-329. ISBN 80-86732-18-5. |
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@inproceedings{558607,
author = {Bublan, Martin and Vašina, Petr and de Poucques, Ludovic and BoisseandLaporte, Caroline and Imbert, JeanandChristophe and Touzeau, Michel},
address = {Praha},
booktitle = {WDS 03 Proceeding of Contributed Papers},
keywords = {optical emission spectroscopy; optical absorption spectroscopy; IPVD; magnetron},
language = {eng},
location = {Praha},
isbn = {80-86732-18-5},
pages = {326-329},
publisher = {MARFYZPRESS, vydavatelství Matematicko-fyzikální fakulty University Karlovy v Praze},
title = {Spatial Distribution of Species in an IPVD reactor},
year = {2003}
}
TY - JOUR
ID - 558607
AU - Bublan, Martin - Vašina, Petr - de Poucques, Ludovic - Boisse-Laporte, Caroline - Imbert, Jean-Christophe - Touzeau, Michel
PY - 2003
TI - Spatial Distribution of Species in an IPVD reactor
PB - MARFYZPRESS, vydavatelství Matematicko-fyzikální fakulty University Karlovy v Praze
CY - Praha
SN - 8086732185
KW - optical emission spectroscopy
KW - optical absorption spectroscopy
KW - IPVD
KW - magnetron
N2 - Results of emission and absorption spectroscopy carried out in the IPVD reactor, consisting of magnetron sputtering device assisted by two antennas of microwave system are presented in this study. The results of the SEM analysis of deposited films are presented too.
ER -
BUBLAN, Martin, Petr VAŠINA, Ludovic DE POUCQUES, Caroline BOISSE-LAPORTE, Jean-Christophe IMBERT a Michel TOUZEAU. Spatial Distribution of Species in an IPVD reactor. In \textit{WDS 03 Proceeding of Contributed Papers}. Praha: MARFYZPRESS, vydavatelství Matematicko-fyzikální fakulty University Karlovy v Praze, 2003, s.~326-329. ISBN~80-86732-18-5.
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