LÜBBERT, D., C. FERRARI, Petr MIKULÍK, P. PERNOT, L. HELFEN, N. VERDI, D. KORYTÁR a T. BAUMBACH. Distribution and Burgers vectors of dislocations in semiconductor wafers investigated by rocking-curve imaging. J. Appl. Crystallography. Velká Britanie: Int. Union of Crystallography, 2005, roč. 38, č. 1, s. 91-96. ISSN 0021-8898. |
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@article{566454, author = {Lübbert, D. and Ferrari, C. and Mikulík, Petr and Pernot, P. and Helfen, L. and Verdi, N. and Korytár, D. and Baumbach, T.}, article_location = {Velká Britanie}, article_number = {1}, keywords = {lattice tilt; diffraction; X-ray diffraction; wafers; defects; InP; GaAs}, language = {eng}, issn = {0021-8898}, journal = {J. Appl. Crystallography}, title = {Distribution and Burgers vectors of dislocations in semiconductor wafers investigated by rocking-curve imaging}, url = {http://sci.muni.cz/~mikulik/Publications.html#LubbertFerrariMikulik-JAC-2005}, volume = {38}, year = {2005} }
TY - JOUR ID - 566454 AU - Lübbert, D. - Ferrari, C. - Mikulík, Petr - Pernot, P. - Helfen, L. - Verdi, N. - Korytár, D. - Baumbach, T. PY - 2005 TI - Distribution and Burgers vectors of dislocations in semiconductor wafers investigated by rocking-curve imaging JF - J. Appl. Crystallography VL - 38 IS - 1 SP - 91-96 EP - 91-96 PB - Int. Union of Crystallography SN - 00218898 KW - lattice tilt KW - diffraction KW - X-ray diffraction KW - wafers KW - defects KW - InP KW - GaAs UR - http://sci.muni.cz/~mikulik/Publications.html#LubbertFerrariMikulik-JAC-2005 N2 - The method called rocking-curve imaging (RCI) has recently been developed to visualize lattice imperfections in large crystals such as semiconductor wafers with high spatial resolution. The method is based on a combination of X-ray rocking-curve analysis and digital X-ray diffraction topography. In this article, an extension of the method is proposed by which dislocation densities in largescale samples (semiconductor wafer crystals) can be quantified and their variation across the sample surface determined in an instrumentally simple way. Results from a nearly dislocation-free S-doped InP crystal and a semi-insulating GaAs are presented; both display a clearly non-random distribution of dislocations. ER -
LÜBBERT, D., C. FERRARI, Petr MIKULÍK, P. PERNOT, L. HELFEN, N. VERDI, D. KORYTÁR a T. BAUMBACH. Distribution and Burgers vectors of dislocations in semiconductor wafers investigated by rocking-curve imaging. \textit{J. Appl. Crystallography}. Velká Britanie: Int. Union of Crystallography, 2005, roč.~38, č.~1, s.~91-96. ISSN~0021-8898.
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