DE POUCQUES, Ludovic, Jean-Christophe IMBERT, Caroline BOISSE-LAPORTE, Petr VAŠINA, Jean BRETAGNE, Lionel TEULÉ-GAY a Michel TOUZEAU. Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements. Plasma Sources Science and Technology. Bristol: Institute of Physics Publishing, 2005, roč. 14, č. 2, s. 321-327. ISSN 0963-0252. |
Další formáty:
BibTeX
LaTeX
RIS
@article{596585, author = {de Poucques, Ludovic and Imbert, JeanandChristophe and BoisseandLaporte, Caroline and Vašina, Petr and Bretagne, Jean and TeuléandGay, Lionel and Touzeau, Michel}, article_location = {Bristol}, article_number = {2}, keywords = {physical vapor deposition; ionised physical vapor deposition; titanium; metal ionisation; density; magnetron}, language = {eng}, issn = {0963-0252}, journal = {Plasma Sources Science and Technology}, title = {Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements}, volume = {14}, year = {2005} }
TY - JOUR ID - 596585 AU - de Poucques, Ludovic - Imbert, Jean-Christophe - Boisse-Laporte, Caroline - Vašina, Petr - Bretagne, Jean - Teulé-Gay, Lionel - Touzeau, Michel PY - 2005 TI - Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements JF - Plasma Sources Science and Technology VL - 14 IS - 2 SP - 321 EP - 321 PB - Institute of Physics Publishing SN - 09630252 KW - physical vapor deposition KW - ionised physical vapor deposition KW - titanium KW - metal ionisation KW - density KW - magnetron N2 - This paper deals with the characterization of an ionized physical vapour deposition (IPVD) reactor using an additional microwave plasma. The IPVD reactor was spatially characterized using optical emission spectroscopy, optical absorption spectroscopy and Langmuir probe measurements. A rectangular titanium target was used, the buffer gas was argon and the pressure was fixed at 4 Pa. The influence of the microwave power (between 0 and 900 W) and the magnetron discharge current (0.5 and 2 A) on the densities of the titanium species (neutral and ionic), argon emission line intensity and titanium and argon temperature variations was investigated. The titanium temperature and densities were measured using the pulsed resonant absorption spectroscopy technique. The neutral and ion fluxes on the substrate were deduced from these measurements. It was found that the ratio phi(Ti+)/phi(Ti-n) increases by a factor of 30 when additional microwave plasma is used. Moreover, we point out the temperature as a key parameter in plasma diagnostic interpretations. ER -
DE POUCQUES, Ludovic, Jean-Christophe IMBERT, Caroline BOISSE-LAPORTE, Petr VAŠINA, Jean BRETAGNE, Lionel TEULÉ-GAY a Michel TOUZEAU. Spatial characterization of an IPVD reactor: neutral gas temperature and interpretation of optical spectroscopy measurements. \textit{Plasma Sources Science and Technology}. Bristol: Institute of Physics Publishing, 2005, roč.~14, č.~2, s.~321-327. ISSN~0963-0252.
|