BOCHNÍČEK, Zdeněk, Jan ČECHAL a Tomáš ŠIKOLA. X-ray reflection study of early stages of Pt silicide formation. In 7th Bienal Conference on High Resolution X-ray Diffraction and Imaging, Book of abstracts. Praha: Fyzikální ústav AV ČR, 2004, s. P7, 1 s. |
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@inproceedings{634264, author = {Bochníček, Zdeněk and Čechal, Jan and Šikola, Tomáš}, address = {Praha}, booktitle = {7th Bienal Conference on High Resolution X-ray Diffraction and Imaging, Book of abstracts}, keywords = {silicidation; Pt; XRR}, language = {eng}, location = {Praha}, pages = {P7}, publisher = {Fyzikální ústav AV ČR}, title = {X-ray reflection study of early stages of Pt silicide formation}, year = {2004} }
TY - JOUR ID - 634264 AU - Bochníček, Zdeněk - Čechal, Jan - Šikola, Tomáš PY - 2004 TI - X-ray reflection study of early stages of Pt silicide formation PB - Fyzikální ústav AV ČR CY - Praha KW - silicidation KW - Pt KW - XRR N2 - X-ray reflection measured in-situ during annealing was used for studying of very early stages of silicide formation from Pt layer deposited on Si substrate. It was shown that interdiffusion betwen two components at temperatures slightly above 100degC which is much lower value than is reported for silicide creation observed by other experimental methods. ER -
BOCHNÍČEK, Zdeněk, Jan ČECHAL a Tomáš ŠIKOLA. X-ray reflection study of early stages of Pt silicide formation. In \textit{7th Bienal Conference on High Resolution X-ray Diffraction and Imaging, Book of abstracts}. Praha: Fyzikální ústav AV ČR, 2004, s.~P7, 1 s.
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