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@inproceedings{698652,
author = {Jašek, Ondřej and Eliáš, Marek and Zajíčková, Lenka and Kučerová, Zuzana and Kudrle, Vít and Matějková, Jiřina and Rek, Antonín and Buršík, Jiří},
address = {Brno},
booktitle = {Proceedings Electronic devices and systems 2006 IMAPS CS International Conference},
edition = {1},
keywords = {carbon nanotubes; plasma enhanced chemical vapor depostion; catalyst; electron microscopy},
language = {eng},
location = {Brno},
isbn = {80-214-3246-2},
pages = {21-26},
publisher = {Vysoké učenní technické v Brně},
title = {Carbon nanotubes deposition by plasma enhanced chemical vapor deposition},
year = {2006}
}
TY - JOUR
ID - 698652
AU - Jašek, Ondřej - Eliáš, Marek - Zajíčková, Lenka - Kučerová, Zuzana - Kudrle, Vít - Matějková, Jiřina - Rek, Antonín - Buršík, Jiří
PY - 2006
TI - Carbon nanotubes deposition by plasma enhanced chemical vapor deposition
PB - Vysoké učenní technické v Brně
CY - Brno
SN - 8021432462
KW - carbon nanotubes
KW - plasma enhanced chemical vapor depostion
KW - catalyst
KW - electron microscopy
N2 - Carbon nanotube properties provoked interest in many fields of application but there is still need to develop deposition techniques, which enable precise control of nanotubes positioning, alignment and properties. Chemical vapor deposition (CVD) methods and lately also plasma enhanced CVD (PECVD) are most promising to reach this goal. In the first part of the article we will briefly describe carbon nanotubes structure and properties and review the necessary conditions and possible control mechanisms used in PECVD deposition method. In the second part, examples of two deposition techniques, one working at a low pressure and one at an atmospheric pressure, will be described and reached results analyzed.
ER -
JAŠEK, Ondřej, Marek ELIÁŠ, Lenka ZAJÍČKOVÁ, Zuzana KUČEROVÁ, Vít KUDRLE, Jiřina MATĚJKOVÁ, Antonín REK a Jiří BURŠÍK. Carbon nanotubes deposition by plasma enhanced chemical vapor deposition. In \textit{Proceedings Electronic devices and systems 2006 IMAPS CS International Conference}. 1. vyd. Brno: Vysoké učenní technické v Brně, 2006, s.~21-26. ISBN~80-214-3246-2.
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