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@article{747817,
author = {Buršíková, Vilma and Dvořák, Pavel and Zajíčková, Lenka and Franta, Daniel and Janča, Jan and Buršík, Jiří and Sobota, Jaroslav and Klapetek, Petr and Bláhová, Olga and Peřina, Vratislav},
article_location = {Bucharest},
article_number = {10},
keywords = {Nanostructured coatingsů;DLC;Hardness;Adhesion;Fracture toughness},
language = {eng},
issn = {1842-6573},
journal = {Optoelectronics and Advanced Materials - Rapid Communications},
title = {Deposition and Characterization of Nanostructured Silicon-Oxide Containing Diamond-Like Carbon Coatings},
volume = {1},
year = {2007}
}
TY - JOUR
ID - 747817
AU - Buršíková, Vilma - Dvořák, Pavel - Zajíčková, Lenka - Franta, Daniel - Janča, Jan - Buršík, Jiří - Sobota, Jaroslav - Klapetek, Petr - Bláhová, Olga - Peřina, Vratislav
PY - 2007
TI - Deposition and Characterization of Nanostructured Silicon-Oxide Containing Diamond-Like Carbon Coatings
JF - Optoelectronics and Advanced Materials - Rapid Communications
VL - 1
IS - 10
SP - 491-495
EP - 491-495
PB - INOE & INFM
SN - 18426573
KW - Nanostructured coatingsů;DLC;Hardness;Adhesion;Fracture toughness
N2 - Nanostructured diamond-like carbon coatings with various silicon-oxide content were deposited on different substrate materials (silicon, glass, polycarbonate and steel) in capacitively coupled r.f. discharge (13.56 MHz). The structure of the prepared films was studied with infrared absorption spectroscopy (FTIR) and X-ray photoelectron spectroscopy. Complete atomic compositions, including hydrogen content and film densities, were determined by combination of RBS and ERD analyses. The complex dielectric function of the films was determined from ellipsometric measurements in the range 1.5-5.2 eV. Matrix Assisted Laser Desorption-Ionisation - Time of Flight Mass Spectrometry (MALDI-TOF) was used to study the deposited films. The mechanical properties of prepared coatings (e.g. hardness, elastic modulus, fracture toughness, coating/substrate adhesion etc.) were studied by means of depth sensing indentation technique using Fischerscope H100 tester. The tribological properties were studied using CSM pin-on-disc tester. The effect of intrinsic stress on the coating properties was investigated. The variation in SiOx content enabled to minimize the intrinsic compressive stress in coatings. Analysis of the evolved crack morphology by means of optical microscopy, scanning electron microscopy (SEM) and atomic force microscopy (AFM) revealed a significant increase in interfacial fracture toughness for the DLC:SiOx films compared to the pure DLC films. On the basis of above described investigation nanocomposite multilayer coatings with enhanced mechanical properties (high hardness, adhesion, fracture toughness, low intrinsic stress) were designed.
ER -
BURŠÍKOVÁ, Vilma, Pavel DVOŘÁK, Lenka ZAJÍČKOVÁ, Daniel FRANTA, Jan JANČA, Jiří BURŠÍK, Jaroslav SOBOTA, Petr KLAPETEK, Olga BLÁHOVÁ a Vratislav PEŘINA. Deposition and Characterization of Nanostructured Silicon-Oxide Containing Diamond-Like Carbon Coatings. Online. \textit{Optoelectronics and Advanced Materials - Rapid Communications}. Bucharest: INOE \&{} INFM, 2007, roč.~1, č.~10, s.~491-495. ISSN~1842-6573. [citováno 2024-04-23]
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