Další formáty:
BibTeX
LaTeX
RIS
@article{800529,
author = {Dvořák, Pavel and Moravec, Zdeněk},
article_location = {Brno},
article_number = {s1311-1538},
keywords = {plasma; discharge; higher harmonics; capacitive; matching},
language = {eng},
issn = {1803-2389},
journal = {Chemické listy},
title = {DEPENDENCE OF HIGHER HARMONIC FREQUENCIES MEASURED IN CAPACITIVELY COUPLED PLASMA ON THE MATCHING UNIT PARAMETERS},
volume = {102},
year = {2008}
}
TY - JOUR
ID - 800529
AU - Dvořák, Pavel - Moravec, Zdeněk
PY - 2008
TI - DEPENDENCE OF HIGHER HARMONIC FREQUENCIES MEASURED IN CAPACITIVELY COUPLED PLASMA ON THE MATCHING UNIT PARAMETERS
JF - Chemické listy
VL - 102
IS - s1311-1538
SP - 1356 - 1359
EP - 1356 - 1359
PB - Česká společnost chemická
SN - 18032389
KW - plasma
KW - discharge
KW - higher harmonics
KW - capacitive
KW - matching
N2 - Higher harmonic frequencies of electric voltage and current are significant features of low-pressure capacitively coupled discharges. Their behaviour is quite complex since it is a function of many plasma and reactor parameters. This article deals with the influence of matching unit parameters on amplitudes of higher harmonics, which were measured by means of an uncompensated probe immersed into the plasma of an asymmetric capacitive discharge. Most of the harmonics reached their maxima in the case of optimal matching, i.e. when the RF power delivered to the discharge was maximal. However, the amount of the power delivered to the discharge did not explain the behaviour of higher harmonics sufficiently. It was shown that at our experimental conditions the behaviour of higher harmonics was determined by the sheath voltage.
ER -
DVOŘÁK, Pavel a Zdeněk MORAVEC. DEPENDENCE OF HIGHER HARMONIC FREQUENCIES MEASURED IN CAPACITIVELY COUPLED PLASMA ON THE MATCHING UNIT PARAMETERS. \textit{Chemické listy}. Brno: Česká společnost chemická, 2008, roč.~102, s1311-1538, s.~1356 - 1359. ISSN~1803-2389.
|
