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@inproceedings{800530, author = {Dvořák, Pavel and Moravec, Zdeněk}, address = {Brno}, booktitle = {2nd CESPC - Book of extended abstracts}, keywords = {plasma; higher harmonics}, language = {eng}, location = {Brno}, pages = {74-74}, publisher = {Ústav fyzikální elektroniky (PřF MU), JČM}, title = {Higher harmonic frequencies measured in Capacitively Coupled Plasma}, year = {2008} }
TY - JOUR ID - 800530 AU - Dvořák, Pavel - Moravec, Zdeněk PY - 2008 TI - Higher harmonic frequencies measured in Capacitively Coupled Plasma PB - Ústav fyzikální elektroniky (PřF MU), JČM CY - Brno KW - plasma KW - higher harmonics N2 - Measurement of higher harmonic frequencies in low-pressure capacitive discharge and dependence of their amplitudes on the matching unit parameters. ER -
DVOŘÁK, Pavel a Zdeněk MORAVEC. Higher harmonic frequencies measured in Capacitively Coupled Plasma. In \textit{2nd CESPC - Book of extended abstracts}. Brno: Ústav fyzikální elektroniky (PřF MU), JČM, 2008, s.~74.
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