2008
Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry
OHLÍDAL, Ivan; David NEČAS; Vilma BURŠÍKOVÁ; Daniel FRANTA; Miloslav OHLÍDAL et. al.Základní údaje
Originální název
Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry
Název česky
Optická charakterizace diamantu podobných tenkých vrstev neuniformních v tloušťce za pomocí spektroskopické reflektometrie
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Vydání
Diamond and Related Materials, New York, Elsevier, 2008, 0925-9635
Další údaje
Jazyk
angličtina
Typ výsledku
Článek v odborném periodiku
Obor
10302 Condensed matter physics
Stát vydavatele
Spojené státy
Utajení
není předmětem státního či obchodního tajemství
Impakt faktor
Impact factor: 2.092
Kód RIV
RIV/00216224:14310/08:00025137
Organizační jednotka
Přírodovědecká fakulta
UT WoS
000256643300066
Klíčová slova anglicky
Diamon-like carbon films; Non-uniformity in thickness; Material parameters; Optical constants
Štítky
Změněno: 3. 7. 2009 09:44, Mgr. Daniel Franta, Ph.D.
V originále
Two formulae expressing the reflectance of non-uniform thin films are presented. The first of them corresponds to the arbitrary shapes of this non-uniformity and illuminated light spot under assumption that this non-uniformity is sufficiently slight. The second formula corresponds to the wedge-shaped non-uniformity of arbitrary magnitude within the circular light spot. It is shown that both the formulae are suitable for the successful optical characterization of non-uniform diamond-like carbon (DLC) thin films in contrast to the usually used reflectance formula for the uniform thin films. Within the optical characterization the values of the standard deviation of non-uniformity is determined together with the correct values of the mean thickness and material parameters corresponding to the dispersion model based on the parameterization of the density of electronic states. On the basis of the material parameters determined the correct spectral dependences of the optical constants of the DLC films studied are calculated.
Česky
Two formulae expressing the reflectance of non-uniform thin films are presented. The first of them corresponds to the arbitrary shapes of this non-uniformity and illuminated light spot under assumption that this non-uniformity is sufficiently slight. The second formula corresponds to the wedge-shaped non-uniformity of arbitrary magnitude within the circular light spot. It is shown that both the formulae are suitable for the successful optical characterization of non-uniform diamond-like carbon (DLC) thin films in contrast to the usually used reflectance formula for the uniform thin films. Within the optical characterization the values of the standard deviation of non-uniformity is determined together with the correct values of the mean thickness and material parameters corresponding to the dispersion model based on the parameterization of the density of electronic states. On the basis of the material parameters determined the correct spectral dependences of the optical constants of the DLC films studied are calculated.
Návaznosti
| GA202/07/1669, projekt VaV |
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| MSM0021622411, záměr |
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| MSM0021630518, záměr |
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