2008
Influence of cross-correlation effects on the optical quantities of rough films
FRANTA, Daniel; Ivan OHLÍDAL a David NEČASZákladní údaje
Originální název
Influence of cross-correlation effects on the optical quantities of rough films
Název česky
Vliv vzájemných korelačních efektů na optické veličiny drsných vrstev
Autoři
FRANTA, Daniel; Ivan OHLÍDAL a David NEČAS
Vydání
Optics Express, elektronicky, Optical Society of America, 2008, 1094-4087
Další údaje
Jazyk
angličtina
Typ výsledku
Článek v odborném periodiku
Obor
10306 Optics
Stát vydavatele
Spojené státy
Utajení
není předmětem státního či obchodního tajemství
Impakt faktor
Impact factor: 3.880
Kód RIV
RIV/00216224:14310/08:00025416
Organizační jednotka
Přírodovědecká fakulta
UT WoS
000256469900025
Klíčová slova anglicky
Roughness; Rayleigh-Rice theory; Cross-correlation effects
Příznaky
Mezinárodní význam, Recenzováno
Změněno: 3. 7. 2009 09:45, Mgr. Daniel Franta, Ph.D.
V originále
Within the Rayleigh-Rice theory the influence of layer boundary roughness on coherently reflected light is expressed using very complex formulae. Therefore we deal with the simplification of these formulae by employing an approximation based on neglecting cross-correlation effects between both the rough boundaries. It is shown that if the mean distance of the boundaries (mean thickness) is sufficiently large in comparison with the lateral dimensions of the roughness it is possible to describe the individual boundaries of the layers by matrices corresponding to isolated rough surfaces. This fact enables us to simplify the formulae for the optical quantities in a substantial way, which also simplifies the numerical calculation needed for the inverse problem. This statement is illustrated by means of a numerical analysis simulating ellipsometric and reflectometric data of rough silicon dioxide layers placed onto silicon single crystal substrates.
Česky
Within the Rayleigh-Rice theory the influence of layer boundary roughness on coherently reflected light is expressed using very complex formulae. Therefore we deal with the simplification of these formulae by employing an approximation based on neglecting cross-correlation effects between both the rough boundaries. It is shown that if the mean distance of the boundaries (mean thickness) is sufficiently large in comparison with the lateral dimensions of the roughness it is possible to describe the individual boundaries of the layers by matrices corresponding to isolated rough surfaces. This fact enables us to simplify the formulae for the optical quantities in a substantial way, which also simplifies the numerical calculation needed for the inverse problem. This statement is illustrated by means of a numerical analysis simulating ellipsometric and reflectometric data of rough silicon dioxide layers placed onto silicon single crystal substrates.
Návaznosti
| FT-TA3/142, projekt VaV |
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| MSM0021622411, záměr |
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