| KERN, Werner. Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications. New Jersey, U.S.A.: Noyes Publications, 1993, 623 s. Materials Science and Process Technology Series. ISBN 978-0815513315. |
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@book{806484,
author = {Kern, Werner},
address = {New Jersey, U.S.A.},
keywords = {surface; cleaning},
location = {New Jersey, U.S.A.},
isbn = {978-0815513315},
publisher = {Noyes Publications},
title = {Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications},
year = {1993}
}
TY - BOOK
ID - 806484
AU - Kern, Werner
PY - 1993
TI - Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications
VL - Materials Science and Process Technology Series
PB - Noyes Publications
CY - New Jersey, U.S.A.
SN - 9780815513315
KW - surface
KW - cleaning
ER -
KERN, Werner. \textit{Handbook of Semiconductor Wafer Cleaning Technology: Science, Technology, and Applications}. New Jersey, U.S.A.: Noyes Publications, 1993, 623 s. Materials Science and Process Technology Series. ISBN~978-0815513315.
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