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@book{806486,
author = {Wolf, Stanley and Tauber, Richard N.},
address = {Sunset Beach, California, U.S.A.},
keywords = {semiconductors; device fabrication},
location = {Sunset Beach, California, U.S.A.},
isbn = {978-0961672164},
publisher = {Lattice Press},
title = {Silicon Processing for the VLSI Era},
year = {1999}
}
TY - BOOK
ID - 806486
AU - Wolf, Stanley - Tauber, Richard N.
PY - 1999
TI - Silicon Processing for the VLSI Era
VL - Vol. 1: Process Technology
PB - Lattice Press
CY - Sunset Beach, California, U.S.A.
SN - 9780961672164
KW - semiconductors
KW - device fabrication
ER -
WOLF, Stanley a Richard N. TAUBER. \textit{Silicon Processing for the VLSI Era}. Sunset Beach, California, U.S.A.: Lattice Press. 960 s. Vol. 1: Process Technology. ISBN~978-0961672164. 1999.
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