OHLÍDAL, Ivan, David NEČAS, Daniel FRANTA a Vilma BURŠÍKOVÁ. Characterization of non-uniform diamond-like carbon films by spectroscopic ellipsometry. Diamond and Related Materials. New York: Elsevier Science S.A., 2009, roč. 18, 2-3, s. 364-367. ISSN 0925-9635. Dostupné z: https://dx.doi.org/10.1016/j.diamond.2008.09.003. |
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@article{808473, author = {Ohlídal, Ivan and Nečas, David and Franta, Daniel and Buršíková, Vilma}, article_location = {New York}, article_number = {2-3}, doi = {http://dx.doi.org/10.1016/j.diamond.2008.09.003}, keywords = {diamond-like carbon films; thickness non-uniformity; material parameters; optical constants}, language = {eng}, issn = {0925-9635}, journal = {Diamond and Related Materials}, title = {Characterization of non-uniform diamond-like carbon films by spectroscopic ellipsometry}, url = {https://doi.org/10.1016/j.diamond.2008.09.003}, volume = {18}, year = {2009} }
TY - JOUR ID - 808473 AU - Ohlídal, Ivan - Nečas, David - Franta, Daniel - Buršíková, Vilma PY - 2009 TI - Characterization of non-uniform diamond-like carbon films by spectroscopic ellipsometry JF - Diamond and Related Materials VL - 18 IS - 2-3 SP - 364-367 EP - 364-367 PB - Elsevier Science S.A. SN - 09259635 KW - diamond-like carbon films KW - thickness non-uniformity KW - material parameters KW - optical constants UR - https://doi.org/10.1016/j.diamond.2008.09.003 L2 - https://doi.org/10.1016/j.diamond.2008.09.003 N2 - In practice many films prepared using various technologies exhibit stronger or slighter area non-uniformity. Diamond-like carbon (DLC) films are also prepared with this non-uniformity sometimes. In this contribution will be shown how to take into account the thickness non-uniformity of the films when their optical characterization is carried out using spectrometric ellipsometry. Two new formulas expressing each of the three associated ellipsometric parameters, i.e. three components of the Stokes vector, of the films exhibiting thickness non-uniformity will be presented for phase modulated ellipsometry. ER -
OHLÍDAL, Ivan, David NEČAS, Daniel FRANTA a Vilma BURŠÍKOVÁ. Characterization of non-uniform diamond-like carbon films by spectroscopic ellipsometry. \textit{Diamond and Related Materials}. New York: Elsevier Science S.A., 2009, roč.~18, 2-3, s.~364-367. ISSN~0925-9635. Dostupné z: https://dx.doi.org/10.1016/j.diamond.2008.09.003.
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