| GROZA, A., A. SURMEIAN, C. DIPLASU, A. TEMPEZ, P. CHAPON, L. LOBO, L. BORDEL, Tereza SCHMIDTOVÁ, Petr VAŠINA, P. BELENGUER, T. NELIS, P. GUILLOT, N. TUCCITO a A. LICCIARDELLO. Ionization Processes and Plasma Chemistry in Pulsed RF Glow Discharge TOF Mass Spectroscopy for Thin Film Depth Profile Analyses. Online. In Book of Abstracts, Second Central European Symposium on Plasma Chemistry. Brno: Masarykova univerzita, 2008. s. 72-73. [citováno 2024-04-23] |
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@inproceedings{813678,
author = {Groza, A. and Surmeian, A. and Diplasu, C. and Tempez, A. and Chapon, P. and Lobo, L. and Bordel, L. and Schmidtová, Tereza and Vašina, Petr and Belenguer, P. and Nelis, T. and Guillot, P. and Tuccito, N. and Licciardello, A.},
address = {Brno},
booktitle = {Book of Abstracts, Second Central European Symposium on Plasma Chemistry},
keywords = {depth profiles; TOF spectrometry},
language = {eng},
location = {Brno},
pages = {72-73},
publisher = {Masarykova univerzita},
title = {Ionization Processes and Plasma Chemistry in Pulsed RF Glow Discharge TOF Mass Spectroscopy for Thin Film Depth Profile Analyses},
year = {2008}
}
TY - JOUR
ID - 813678
AU - Groza, A. - Surmeian, A. - Diplasu, C. - Tempez, A. - Chapon, P. - Lobo, L. - Bordel, L. - Schmidtová, Tereza - Vašina, Petr - Belenguer, P. - Nelis, T. - Guillot, P. - Tuccito, N. - Licciardello, A.
PY - 2008
TI - Ionization Processes and Plasma Chemistry in Pulsed RF Glow Discharge TOF Mass Spectroscopy for Thin Film Depth Profile Analyses
PB - Masarykova univerzita
CY - Brno
KW - depth profiles
KW - TOF spectrometry
N2 - Ionization Processes and Plasma Chemistry in Pulsed RF Glow Discharge TOF Mass Spectroscopy for Thin Film Depth Profile Analyses, proceeding
ER -
GROZA, A., A. SURMEIAN, C. DIPLASU, A. TEMPEZ, P. CHAPON, L. LOBO, L. BORDEL, Tereza SCHMIDTOVÁ, Petr VAŠINA, P. BELENGUER, T. NELIS, P. GUILLOT, N. TUCCITO a A. LICCIARDELLO. Ionization Processes and Plasma Chemistry in Pulsed RF Glow Discharge TOF Mass Spectroscopy for Thin Film Depth Profile Analyses. Online. In \textit{Book of Abstracts, Second Central European Symposium on Plasma Chemistry}. Brno: Masarykova univerzita, 2008. s.~72-73. [citováno 2024-04-23]
|
