| CAHA, Ondřej, Josef KUBĚNA, Alan KUBĚNA a Mojmír MEDUŇA. Vacancies and self-interstitials dynamics in silicon wafers. Solid State Phenomena. Switzerland: Trans Tech Publications, 2009, Neuveden, 156-158, s. 139-144. ISSN 1012-0394. |
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@article{862553,
author = {Caha, Ondřej and Kuběna, Josef and Kuběna, Alan and Meduňa, Mojmír},
article_location = {Switzerland},
article_number = {156-158},
keywords = {Silicon; vacancies; Interstitials; nucleation},
language = {eng},
issn = {1012-0394},
journal = {Solid State Phenomena},
title = {Vacancies and self-interstitials dynamics in silicon wafers},
volume = {Neuveden},
year = {2009}
}
TY - JOUR
ID - 862553
AU - Caha, Ondřej - Kuběna, Josef - Kuběna, Alan - Meduňa, Mojmír
PY - 2009
TI - Vacancies and self-interstitials dynamics in silicon wafers
JF - Solid State Phenomena
VL - Neuveden
IS - 156-158
SP - 139-144
EP - 139-144
PB - Trans Tech Publications
SN - 10120394
KW - Silicon
KW - vacancies
KW - Interstitials
KW - nucleation
N2 - This work deals mainly with the nucleation of vacancies during RTA concerning various cooling rates and initial states.
ER -
CAHA, Ondřej, Josef KUBĚNA, Alan KUBĚNA a Mojmír MEDUŇA. Vacancies and self-interstitials dynamics in silicon wafers. \textit{Solid State Phenomena}. Switzerland: Trans Tech Publications, 2009, Neuveden, 156-158, s.~139-144. ISSN~1012-0394.
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