| KOLMAČKA, Michal, Magdaléna KADLEČÍKOVÁ, Juraj BREZA, Filip LAZIŠŤAN, Lenka ZAJÍČKOVÁ, Marek ELIÁŠ, Karol JESENÁK a Katarína PASTORKOVÁ. Wireless temperature measurement in the hot filament CVD reactor for deposition of carbon nanotubes. Journal of Electrical Engineering. Bratislava: Slovak University of Technology, 2009, roč. 2009, Vol. 60, s. 346-349. ISSN 1335-3632. |
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@article{863853,
author = {Kolmačka, Michal and Kadlečíková, Magdaléna and Breza, Juraj and Lazišťan, Filip and Zajíčková, Lenka and Eliáš, Marek and Jesenák, Karol and Pastorková, Katarína},
article_location = {Bratislava},
article_number = {Vol. 60},
keywords = {carbon nanotubes; chemical vapour deposition; isolation amplifier},
language = {eng},
issn = {1335-3632},
journal = {Journal of Electrical Engineering},
title = {Wireless temperature measurement in the hot filament CVD reactor for deposition of carbon nanotubes},
volume = {2009},
year = {2009}
}
TY - JOUR
ID - 863853
AU - Kolmačka, Michal - Kadlečíková, Magdaléna - Breza, Juraj - Lazišťan, Filip - Zajíčková, Lenka - Eliáš, Marek - Jesenák, Karol - Pastorková, Katarína
PY - 2009
TI - Wireless temperature measurement in the hot filament CVD reactor for deposition of carbon nanotubes
JF - Journal of Electrical Engineering
VL - 2009
IS - Vol. 60
SP - 346-349
EP - 346-349
PB - Slovak University of Technology
SN - 13353632
KW - carbon nanotubes
KW - chemical vapour deposition
KW - isolation amplifier
N2 - The experimental work deals with measuring the temperature in the hot filament chemical vapour deposition (HF CVD) reactor by a purpose-built electronic circuit. The objective is to optimize the substrate temperature, one of the key technological parameters in the synthesis of carbon nanotubes. The main outcome of the work is the design and construction of a functional thermometer, its precision calibration and improved accuracy of temperature measurement.
ER -
KOLMAČKA, Michal, Magdaléna KADLEČÍKOVÁ, Juraj BREZA, Filip LAZIŠŤAN, Lenka ZAJÍČKOVÁ, Marek ELIÁŠ, Karol JESENÁK a Katarína PASTORKOVÁ. Wireless temperature measurement in the hot filament CVD reactor for deposition of carbon nanotubes. \textit{Journal of Electrical Engineering}. Bratislava: Slovak University of Technology, 2009, roč.~2009, Vol. 60, s.~346-349. ISSN~1335-3632.
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