FB100 Plasma chemical processes

Faculty of Science
Autumn 2005
Extent and Intensity
2/0. Type of Completion: z (credit).
Teacher(s)
prof. RNDr. Mirko Černák, CSc. (lecturer)
prof. RNDr. Jan Janča, DrSc. (lecturer)
doc. Ing. Pavel Šunka, CSc. (lecturer)
Guaranteed by
prof. RNDr. Jan Janča, DrSc.
Department of Physical Electronics - Physics Section - Faculty of Science
Contact Person: prof. RNDr. Jan Janča, DrSc.
Timetable
Tue 9:00–10:50 Fs3,04018
Prerequisites
F5170 Plasma Physics
Course Enrolment Limitations
The course is also offered to the students of the fields other than those the course is directly associated with.
fields of study / plans the course is directly associated with
Course objectives
Rate of plasma chemical reaction. Different kinds of plasma chemical reactions. Homogeneous and heterogeneous plasma chemical reactions. Plasma chemical reactors.Power supply and matching networks of plasma chemical reactors.Plasma surface treatment of solid materials. Plasma polymerization. Deposition of thin films. Plasma sputtering and plasma spraying.Deposition of hard and supra hard coatings. Mebranes and semipermeable thin films. Plasma ashing and plasma etching. Plasma chemical processes in semiconductor industry.Plasma in modern lighting techniques.Plasma metallurgy.
Syllabus
  • Rate of plasma chemical reaction. Different kinds of plasma chemical reactions. Homogeneous and heterogeneous plasma chemical reactions. Plasma chemical reactors.Power supply and matching networks of plasma chemical reactors.Plasma surface treatment of solid materials. Plasma polymerization. Deposition of thin films. Plasma sputtering and plasma spraying.Deposition of hard and supra hard coatings. Mebranes and semipermeable thin films. Plasma ashing and plasma etching. Plasma chemical processes in semiconductor industry.Plasma in modern lighting techniques.Plasma metallurgy.
Assessment methods (in Czech)
Kolovkium
Language of instruction
English
Further comments (probably available only in Czech)
Information on completion of the course: Způsob ukončení je dán individuálním studijním plánem
The course can also be completed outside the examination period.
The course is taught annually.
The course is also listed under the following terms Autumn 2007 - for the purpose of the accreditation, Autumn 1999, Autumn 2010 - only for the accreditation, Autumn 2000, Autumn 2001, Autumn 2002, Autumn 2003, Autumn 2004, Autumn 2006, Autumn 2007, Autumn 2008, Autumn 2009, Autumn 2010, Autumn 2011, Autumn 2011 - acreditation, spring 2012 - acreditation, Autumn 2012, Autumn 2013, Autumn 2014, Autumn 2015, Autumn 2016, autumn 2017, Autumn 2018, Autumn 2019, Autumn 2020.
  • Enrolment Statistics (Autumn 2005, recent)
  • Permalink: https://is.muni.cz/course/sci/autumn2005/FB100