| FRANTA, Daniel, Ivan OHLÍDAL, Vilma BURŠÍKOVÁ a Lenka ZAJÍČKOVÁ. Optical Properties of Diamond-Like Carbon Films Containing SiOx Studied by the Combined Method of Spectroscopic Ellipsometry and Spectroscopic Reflectometry. Thin Solid Films. Oxford, UK: Elsevier science, 2004, roč. 455-456, č. 1, s. 393-398. ISSN 0040-6090. |
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@article{555829,
author = {Franta, Daniel and Ohlídal, Ivan and Buršíková, Vilma and Zajíčková, Lenka},
article_location = {Oxford, UK},
article_number = {1},
keywords = {Ellipsometry; Reflection; Optical properties; Amorphous materials},
language = {eng},
issn = {0040-6090},
journal = {Thin Solid Films},
title = {Optical Properties of Diamond-Like Carbon Films Containing SiOx Studied by the Combined Method of Spectroscopic Ellipsometry and Spectroscopic Reflectometry},
url = {http://hydra.physics.muni.cz/~franta/bib/TSF455_393.html},
volume = {455-456},
year = {2004}
}
TY - JOUR
ID - 555829
AU - Franta, Daniel - Ohlídal, Ivan - Buršíková, Vilma - Zajíčková, Lenka
PY - 2004
TI - Optical Properties of Diamond-Like Carbon Films Containing SiOx Studied by the Combined Method of Spectroscopic Ellipsometry and Spectroscopic Reflectometry
JF - Thin Solid Films
VL - 455-456
IS - 1
SP - 393-398
EP - 393-398
PB - Elsevier science
SN - 00406090
KW - Ellipsometry
KW - Reflection
KW - Optical properties
KW - Amorphous materials
UR - http://hydra.physics.muni.cz/~franta/bib/TSF455_393.html
N2 - In this paper the results of the study of the optical properties of diamond like carbon films with different amount of SiOx prepared by plasma enhanced chemical vapor deposition from a mixture of metane and hexamethyldisiloxane onto silicon substrates will be presented. These results have been obtained using the combined method based on a simultaneous interpretation of experimental data achieved with variable angle spectroscopic ellipsometry and near-normal spectroscopic reflectometry within the near-UV and visible regions. For interpreting the experimental data our new dispersion model of the optical constants based on the parameterization of the density of electronic states has been employed. Within this model the new analytical three parameter dispersion formula has been derived. These three parameters are proportional to the pi and sigma valence electron densities.
ER -
FRANTA, Daniel, Ivan OHLÍDAL, Vilma BURŠÍKOVÁ a Lenka ZAJÍČKOVÁ. Optical Properties of Diamond-Like Carbon Films Containing SiOx Studied by the Combined Method of Spectroscopic Ellipsometry and Spectroscopic Reflectometry. \textit{Thin Solid Films}. Oxford, UK: Elsevier science, 2004, roč.~455-456, č.~1, s.~393-398. ISSN~0040-6090.
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